氧化铁薄膜的原子层沉积工艺及其机理研究

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1、分类号TB34学号13010017ＵＤＣ密级公开工学硕士学位论文氧化铁薄膜的原子层沉积工艺及其机理研究硕士生姓名管鑫学科专业材料科学与工程研究方向伪装隐身材料指导教师程海峰研究员国防科学技术大学研究生院二〇一五年五月TheStudyofAtomicLayerDepositionProcessandMechanismofOxideThinFilmsCandidate：GuanXinAdvisor：ChengHaifengAthesisSubmittedinpartialfulfillmentoftherequirementsfor

2、theprofessionaldegreeofMasterofEngineeringinMaterialsScienceandEngineeringGraduateSchoolofNationalUniversityofDefenseTechnologyChangsha,Hunan,P.R.China（May,2015）国防科学技术大学研究生院硕士学位论文目录目录....................................................................................

3、..........................................II表目录............................................................................................................................IV图目录...........................................................................................

4、...................................V摘要...............................................................................................................................iAbstract.............................................................................................

5、...............................iii第一章绪论.........................................................11.1引言....................................................................................................................11.2氧化铁薄膜的研究进展及其制备方法.............................

6、...............................11.2.1氧化铁薄膜的研究进展..........................................................................11.2.2氧化铁薄膜的制备方法..........................................................................31.3原子层沉积技术概述...........................................

7、.............................................51.3.1沉积原理..................................................................................................51.3.2材料体系..................................................................................................61.4原子

8、层沉积技术在磁性金属氧化物上的应用................................................81.4.1原子层沉积技术制备磁性金属氧化物............................................