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1、万方数据II万方数据一垒皇!墼!Abs仃actThesiliconresonantaccelerometerhassuchoutstandingadvantagesashighprecision，smallvolume，fi'equencyoutputandSOon．Itwaswidespreadusedinmilitaryandcivilapplicationfield．Toimprovetheoverallperformanceofthemicrosiliconresonantacceler
2、ometer,someimprovementaboutthedrivercircuitofmicromechanicalsiliconresonantaccelerometerwasgiyeninthispaper．Theexperimentresultshownthatthepracticabilityandreliabilityofsiliconmicroresonantaccelerometerwereincreased．Researchworkmainlyincludedthefollo
3、wingcontents：(1)Theresearchstatusaboutmicrosiliconresonantaccelerometersystemathomeandabroadwasintroduced．Severalcommonlyuseddrivingmodeofthesystemwasexpounded．Theworkingprincipleofsiliconmicroresonantaccelerometerwasanalyzed．Duringthechangingoftempe
4、rature，specialoutputofthesystemwasanalysed．(2)Therelationshipbetweenthevoltagenoiseandphasenoisewassimplydeduced．Toimplementtheimpedancematchingofinterfacecircuit，accelerometerelectricalequivalentmodelwasestablished．Relevantmethodsweregiventosolvethi
5、sproblem．Atemperaturecompensationmethodwasmentioned．(3)Tooptimizetheloopfilterdesign，thestructureofphase—lockedloopsystemwasexpounded．Therelationshipbetweentheresonantfrequencyandthedrivewasanalyzed．Themethodofsettingthebestdrivewasgiven．(4)Toincreas
6、etheanti-jammingabilityofsiliconmicroresonantaccelerationsystem，thePCBdesignofpowercircuitandtheSignaltransmissionwaywereimproved．Electromagneticshieldingofthesystemwasused．(5)Itwassaid，theanti—interferenceabilityofthesystemwasincreasedaftersomeimpro
7、vementaboutthedriverciecuitofthemicrosiliconresonantaccelerometerwasdone．OtherrelatedperformancemetriCSwasalsoimproved．Keywords：MicromechanicalSiliconResonantAccelerometer，DriveCircuit，OptimizedDesignIII万方数据Abstmct万方数据目录摘要⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯
8、⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．IABSTRACT⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯III目录⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯V第一章绪论⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．11．1引言⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯一11．2课题研究背景及意义⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯
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