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1、SemiconductorMaterialsMICRODEVICESPhysicsandFabricationTechnologiesSeriesEditors:IvorBrodieandArdenSherSRIInternationalMenloPark,CaliforniaRecentvolumesinthisseries:COMPOUNDANDJOSEPHSONHIGH-SPEEDDEVICESEditedbyTakahikoMisugiandAkihiroShibatomiELECTRONAND
2、IONOPTICSMiklosSzilagyiELECTRONBEAMTESTINGTECHNOLOGYEditedbyJohnT.L.ThongORIENTEDCRYSTALLIZATIONONAMORPOUSSUBSTRATESE.I.GivargizovPHYSICSOFHIGH-SPEEDTRANSISTORSJurasPolzelaTHEPHYSICSOFMICRO/NANO-FABRICATIONIvorBrodieandJuliusJ.MurayPHYSICSOFSUBMICRONDEVI
3、CESDavidK.FerryandRobertO.GrondinTHEPHYSICSOFSUBMICRONLITHOGRAPHYKamilA.ValievRAPIDTHERMALPROCESSINGOFSEMICONDUCTORSVictorE.BorisenkoandPeterJ.HeskethSEMICONDUCTORALLOYSPhysicsandMaterialsEngineeringAn-BanChenandArdenSherSEMICONDUCTORDEVICEPHYSICSANDSIMU
4、LATIONJ.S.YuanandJ.J.LiouSEMICONDUCTORLITHOGRAPHYPrinciples,Practices,andMaterialsWayneM.MoreauSEMICONDUCTORMATERIALSAnIntroductiontoBasicPrinciplesB.G.YacobiSEMICONDCUTORPHYSICALELECTRONICSShengS.LiAContinuationOrderPlanisavailableforthisseries.Acontinu
5、ationorderwillbringdeliveryofeachnewvolumeimmediatelyuponpublication.Volumesarebilledonlyuponactualshipment.Forfurtherinformationpleasecontactthepublisher.SemiconductorMaterialsAnIntroductiontoBasicPrinciplesB.G.YacobiUniversityofTorontoToronto,Ontario,C
6、anadaKLUWERACADEMICPUBLISHERSNEWYORK,BOSTON,DORDRECHT,LONDON,MOSCOWeBookISBN:0-306-47942-7PrintISBN:0-306-47361-5©2004KluwerAcademicPublishersNewYork,Boston,Dordrecht,London,MoscowPrint©2003KluwerAcademic/PlenumPublishersNewYorkAllrightsreservedNopartoft
7、hiseBookmaybereproducedortransmittedinanyformorbyanymeans,electronic,mechanical,recording,orotherwise,withoutwrittenconsentfromthePublisherCreatedintheUnitedStatesofAmericaVisitKluwerOnlineat:http://kluweronline.comandKluwer'seBookstoreat:http://ebooks.k
8、luweronline.comPrefaceThetechnologicalprogressiscloselyrelatedtothedevelopmentsofvariousmaterialsandtoolsmadeofthosematerials.Eventhedifferentageshavebeendefinedinrelationtothematerialsused.Someofthemajorattributesofthepre
