GaN薄膜位错对载流子性能影响的研究

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1、⋣ेᐕъབྷᆖ⺅༛ᆖս䇪᮷GaN㮺㟒փ䭏ሯ䖳⍷ᆆᙝ㜳ᖧଃⲺ⹊ガ᪎㾷ᵜ᮷ѫ㾱⹄ウҶ࡙⭘䠁኎ᴹᵪॆᆖ≄⴨⊹〟˄MOCVD˅ᐕ㢪൘㬍ᇍ⸣˄Į-Al2O3˅㺜ᓅкཆᔦ⭏䮯ⲴGaN㮴㟌ѝク䘿ᙗս䭉ሩ䖭⍱ᆀᙗ㜭Ⲵᖡ૽DŽ俆䙊䗷᭩ਈ⭏䮯৲ᮠᗇࡠཊњާᴹн਼ս䭉ᇶᓖⲴGaNཆᔦ㮴㟌ṧ૱ˈᒦሩ䜘࠶ṧ૱䘋㹼ᘛ䙏䘰⚛༴⨶ˈԕ਼аṧ૱ާᴹн਼ս䭉ᇶᓖˈ❦ਾሩṧ૱䘋㹼ৼᲦXሴ㓯㹽ሴ˄DCXRD˅ǃ㠤ਁ˄PL˅ǃ䴽ቄ᭸ᓄ˄Hall˅৺䘿ሴ⭥ᆀᱮᗞ䮌˄TEM˅䘋㹼Ự⍻DŽᵜᇎ傼ѝ࡙⭘TEMሩ㮴㟌ṧ૱ѝս䭉Ⲵ࠶ᐳ৺䎠ੁ䘋㹼㿲ሏˈᒦ䟷⭘ㆰׯ᱃㹼ⲴDCXRD

2、⌅䇑㇇ս䭉ᇶᓖDŽ䙊䗷䈕ᯩ⌅㧧ᗇҶᮠ䟿㓗൘108cm-2㤳തⲴս䭉ᇶᓖˈᒦ൘↔ส⹰к᧒㍒Ҷս䭉ᇶᓖо䖭⍱ᆀᙗ㜭৺GaN⭥⢩ᙗⲴޣ㌫DŽ䙊䗷ս䭉ᇶᓖо䖭⍱ᆀ⎃ᓖ৺䗱〫⦷ѻ䰤Ⲵޣ㌫ᴢ㓯ਁ⧠ˈ䖭⍱ᆀ⎃ᓖ䲿ս䭉ᇶᓖⲴ໎࣐䙀⑀໎࣐ˈ䗱〫⦷ࡉ⴨৽DŽ䙊䗷࠶᷀ᖡ૽䖭⍱ᆀ⎃ᓖⲴ਴⿽ഐ㍐ˈᵜ᮷䇔Ѫ⭡Ҿս䭉㓯䱴䘁Ღփ޵৏ᆀᧂࡇਁ⭏⮨ਈˈ⋯ս䭉㓯ᆈ൘䖳བྷⲴ⮨ਈ㜭ˈս䭉ᇶᓖⲴ໎བྷՊ໎࣐ᯭѫර㕪䲧ⲴᖒᡀˈӾ㘼䙐ᡀ䖭⍱ᆀ⎃ᓖ䲿ս䭉ᇶᓖⲴ໎࣐㘼໎࣐DŽ਼ᰦˈ⋯ս䭉㓯䱴䘁ᆈ൘࣯൪ˈሩ䖭⍱ᆀާᴹ᰾ᱮᮓሴ֌⭘ˈ㜭ᱮ㪇䱽վ䖭⍱ᆀ䗱〫⦷ˈഐ↔䖭⍱ᆀ䗱〫⦷Պ䲿ᇶᓖⲴ

3、໎࣐㘼䱽վˈф൘108cm-2Ⲵս䭉ᇶᓖ㤳ത޵䗱〫⦷Ⲵਈॆާᴹঅ䈳ᙗDŽ䖭⍱ᆀਈॆՊ䙐ᡀGaN㮴㟌ᙗ㜭Ⲵ᭩ਈˈ䙊䗷ሩGaNṧ૱ᆖᙗ㜭৺⭥ᆖᙗ㜭оս䭉ޣ㌫ᴢ㓯Ⲵ࠶᷀ਁ⧠ˈ൘ս䭉ᇶᓖᴰվⲴṧ૱ѝPL䉡ᑖ䗩ጠᕪᓖᴰվˈ哴ጠᕪоᑖ䗩ጠᕪѻ∄˄IYL/I0˅ᴰ儈DŽ㘼൘ަᆳṧ૱ѝˈ䲿⵰ս䭉ᇶᓖⲴ໎࣐ˈPL䉡Ⲵᑖ䗩ጠᕪᓖ䙀⑀䱽վˈIYL/I0੸䙀⑀кॷ䎻࣯ˈሩ∄਼аṧ૱㓿н਼⑙ᓖ䘰⚛ਾҏਁ⧠਼ṧ㿴ᖻDŽ↔ཆˈ䙊䗷∄䖳н਼ṧ૱⭥䱫⦷䲿ս䭉ᇶᓖⲴਈॆ㿴ᖻਁ⧠ˈ⭡Ҿս䭉൘ཆᔦቲѝᖒᡀҶ䖭⍱ᆀ〫ࣘⲴվ䱫⅗࿶䙊䚃ˈᗇGaNṧ૱Ⲵ⭥䱫⦷䲿⵰ս䭉ᇶ

4、ᓖⲴ໎࣐㘼䙀⑀䱽վDŽޣ䭞䇽˖䠁኎ᴹᵪॆᆖ≄⴨⊹〟˄MOCVD˅ˈク䘿ᙗս䭉ᇶᓖˈ䖭⍱ᆀ⎃ᓖˈ䗱〫⦷ˈᑖ䗩ጠI⋣ेᐕъབྷᆖ⺅༛ᆖս䇪᮷THETHESTUDYSTUDYSTUDYOFOFOFTHETHETHEINFLUENCEINFLUENCEINFLUENCEOFOFOFTHETHETHEGaNGaNGaNTHINTHINFILMFILMDISLOCATIONSDISLOCATIONSDISLOCATIONSONONONTHETHETHECARRIERCARRIERPROPERTIESABSTRACTTheeffect

5、ofthreadingdislocationdensity(TDD)inGaNthinfilms,whichweregrownonthesapphire(Į-Al2O3)substratebymetalorganicchemicalvapordeposition(MOCVD),wasstudiedinthispaper.Firstly,differentGaNthinfilmsweregrownwithdifferentparametersinordertoachievethedifferentTDDs,andsom

6、esamplewastreatedbytherapidtreatingprogress(RTP)tomakedifferentTDDsinthesamesample.Then,theTDDsandopticalandelectricalcharacterofGaNsamplesweremeasuredbydouble-crystalX-raydiffraction(DCXRD)ǃphotoluminescence(PL)ǃHallmeasurementandtransmissionelectronmicroscope

7、(TEM).TheTEMwasusedtoinvestigatetheTDdistributionanddeveloped.TheTDDswereinthemagnitudeof108cm-2calculatedbyDCXRD,andthenbasedontheseresultstherelationshipbetweentheTDDsandpropertiesofcarrierandphoto-electricityofGaN.ThroughtherelationshipcurvesbetweenTDDsandca

8、rrierconcentrationormobilityofGaNsamples,itwasnoticedthatthecarrierconcentrationincreasedwiththeTDDsincreasing,whilethemobilitywascontrary.Thereasonableexplanationwasachieve