外差干涉纳米级光栅位移测量系统关键技术研究

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1、分类号TH741.6学号12039014ＵＤＣ620.3密级公开工学博士学位论文外差干涉纳米级光栅位移测量系统关键技术研究博士生姓名林存宝学科专业仪器科学与技术研究方向传感器与战场环境监测指导教师颜树华教授国防科学技术大学研究生院二〇一六年九月ResearchonKeyTechnologiesofGrating-basedHeterodyneInterferometricDisplacementMeasurementSystemswithNanometerResolutionCandidate：LinCunbaoSupervisor：YanShuhuaAdissertationSubm

2、ittedinpartialfulfillmentoftherequirementsforthedegreeofDoctorofEngineeringinInstrumentScienceandTechnologyGraduateSchoolofNationalUniversityofDefenseTechnologyChangsha，Hunan，P.R.ChinaSeptember，2016国防科学技术大学研究生院博士学位论文目录摘要............................................................................

3、.....................................iAbstract..............................................................................................................iii第一章绪论......................................................................................................11.1选题背景与研究意义.................

4、....................................................................11.1.1选题背景..............................................................................................11.1.2研究意义..............................................................................................31.2光栅位移测量方法发展现状....

5、.....................................................................41.2.1几何莫尔技术......................................................................................41.2.2零差干涉技术......................................................................................61.2.3外差干涉技术...................

6、.................................................................111.3本文主要研究工作与内容安排...................................................................141.3.1主要研究工作....................................................................................141.3.2本文内容安排....................................

7、................................................16第二章测量系统光路设计与原理分析............................................................182.1一维位移测量系统.....................................................................................