Combinatorial approaches for high-throughput characterization of mechanical properties

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1、JMateriomics3(2017)209e220ContentslistsavailableatScienceDirectJMateriomicsjournalhomepage:www.journals.elsevier.com/journal-of-materiomics/Combinatorialapproachesforhigh-throughputcharacterizationofmechanicalproperties*XiaokunZhang,YongXiangStateKeyLaboratoryofElectronicThinFilms&IntegratedDevice

2、s,SchoolofEnergyScienceandEngineering,UniversityofElectronicScienceandTechnologyofChina,2006XiyuanAvenue,WestHigh-TechZone,Chengdu,Sichuan611731,ChinaarticleinfoabstractArticlehistory:Sincethefirstsuccessfulstorywasreportedinthemiddleof1990s,combinatorialmaterialssciencehasReceived30June2017attract

3、edmoreandmoreattentionsinthematerialscommunity.Inthepasttwodecades,agreatamountReceivedinrevisedformofefforthasbeenmadetodevelopcombinatorialhigh-throughputapproachesformaterialsresearch.26July2017However,fewhigh-throughputmechanicalcharacterizationmethodsandtoolswerereported.Todate,aAccepted28Jul

4、y2017numberofmicro-scalemechanicalcharacterizationtoolshavebeendeveloped,whichprovidedabasisAvailableonline29July2017forcombinatorialhigh-throughputmechanicalcharacterization.Manyexistingmicro-mechanicaltestingapparatusescanbepertinentlymodifiedforhigh-throughputcharacterization.Forexample,automate

5、dKeywords:scanningnanoindentationisusedformeasuringthehardnessandelasticmodulusofdiffusionmultipleMaterialsgenomeCombinatorialalloysamples,andcantileverbeamarraysareusedtoparallellycharacterizethethermalmechanicalHigh-throughputbehaviorofthinfilmswithwidecompositiongradients.Theinterpretationofmicr

6、o-mechanicaltestingMechanicalpropertiesdatafromthinfilmsandmicro-scalesamplesismostcriticalandchallenging,asthemechanicalprop-Structuralmaterialsertiesoftheirbulkcounterpartscannotbeintuitivelyextrapolatedduetothewell-knownsizeandmicrostructuredependence.Nevertheless,high-throughputmechanicalcharac

7、terizationdatafromcombinatorialmicro-scalesamplesstillreflectthedependencetrendofthemechanicalpropertiesoncompositionsandmicrostructure,whichfacilitatestheunderstandingofintrinsicmaterialsbehaviorandthefastscreeni