Michael quirk_半导体制造技术_第二章_半导体材料特性.ppt

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1、SemiconductorManufacturingTechnologyMichaelQuirk&JulianSerda©October2001byPrenticeHallChapter2CharacteristicsofSemiconductorMaterialsObjectivesAfterstudyingthematerialinthischapter,youwillbeableto:1.Describetheatom,includingvalenceshell,bandtheoryandions.2.Interprettheperiodictabl

2、ewithregardstomaingroupelementsandexplainhowionicandcovalentbondsareformed.3.Statethethreeclassesofmaterialsanddescribeeachonewithregardstocurrentflow.4.Explainresistivity,resistance,capacitanceanddiscusstheirimportancetowaferfabrication.5.Describepuresiliconandgivefourreasonswhyi

3、tisthemostcommonsemiconductormaterial.6.Explaindopingandhowthetrivalentandpentavalentdopantelementsmakesiliconausefulsemiconductormaterial.7.Explainp-type(acceptor)siliconandn-type(donor)silicon,howsiliconresistivitychangeswiththeadditionofadopant,andthePNjunction.8.Discussalterna

4、tivesemiconductormaterials,withemphasisongalliumarsenide.AtomicStructureMatterElementNucleusProtonNeutronOrbitalShellElectronMoleculeCompoundElectronsElectronEnergyValenceShellsEnergy-BandTheoryIonsElementaryModeloftheCarbonAtomCarbonatom:Thenucleuscontainsanequalnumberofprotons(+

5、)andneutrons(6each).Sixelectrons(-)orbitaroundthenucleus.ValenceelectronElectron(negativecharge)Neutron(neutralcharge)Atomicnumber(numberofprotons)Nucleus(centerofatom;containsprotonsandneutrons)OrbitalshellProton(positivecharge)Valenceshell(outershellofatom)C6++NN+NN++N+N------Fi

6、gure2.1ElectronShellsinAtomsFigure2.2K=2L=8M=18N=32O=32P=10Q=2ElectronShellsforSodiumandChlorineAtoms-----------Na11SodiumatomChlorineatomCl17-----------------Figure2.3EnergyBandGapsSemiconductorConductionBandValenceBandEnergyGapElectronEnergyConductionBandValenceBandInsulatorEner

7、gyGapElectronEnergyConductionBandValenceBandOverlappingbands-littleenergyisneededforconductionConductorElectronEnergyFigure2.4SodiumChloride+SodiumionA+ionisformedwhenanatomlosesanelectron.Na11-----------ChlorineionA-ionisformedwhenanatomgainsanelectron.Cl17------------------Figur

8、e2.5ThePeriodicTableCharacteristi