P型微晶硅材料的性能分析与其在柔性衬底非晶硅基薄膜太阳电池上的应用

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1、AbstractToday,thesolarcellswhichareinexpensivehavebeenthefocusofresearch，andeachkindofsolarcellhasitsownstrongpoint，ouradversestructureamorphouscells、柝tllPtypemicrocrystallinesiliconmaterialsastheirwindowlayerhaveadvantageofhighabsorbabilityquotietyofa-Si：Handgoodelectronictraitcomingfrommicroc

2、rystallinesiliconmaterials，besides，flexiblesubstratewillmaketheapplicationfiledofthiskindofsolarcellveryexpansive．ThethesisdescribeshowtouseRF—PECVDtechnologytodepositPtypemicrocrystallinesiliconmaterialsandadversestructureamorphoussolarcells、矶thflexiblesubstrate，afterintroducingthedevelopmentb

3、ackground，experimentandtestingmethodsofsolarcells，thisthesistakesinfluenceofPtypemicrocrystallinesiliconfilmandapplicationtosolarcellsasitsmainpart．IntheinvestigationofPtypemicrocrystallinesiliconfilm，thethesisdiscussestheinfluenceofhydrogendilution，reactivepressure，dischargepower,substratetemp

4、eratureandborondopedconcentrationondarkconductivity,opticalbandgapandcrystallizationofmaterials，analyzestheeffectsofdepositionprincipleofreactiveparameterindetail，intheendofthispart，depositionartsandcraftsofbi-layerPtypemicrocrystallinesiliconfilmisbasicallydiscussed，thusweproducep-lxc·Si：Hfilm

5、withgoodcrystallizationanddarkcircuitofwhichis0．8mA．Afterappliedtoamorphoussiliconsolarcells，thethesisdiscusseseffectoffilmthickness，dopedconcentrationandcrystallizationofPtypemicrocrystallinesiliconmaterialsonoutputtraitsofsolarcellsindetail，alsoanalyzestheinfluenceofIlayeronp．g,c．Si：Hfilmands

6、olarcells，finally,disposalmethodsofI／Pinterfaceisinvestigated，thenwesuccessfullyproducesolarcellwithconversationefficiencyexceeding4％．Keywords：RF—PECVD，p一岍一Si：H，a-Si：HsolarcellswithflexiblesubstrateIl目录摘要⋯⋯⋯⋯⋯⋯⋯⋯．．⋯⋯⋯⋯⋯⋯⋯．．⋯IAbstract．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．II目录⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯

7、⋯⋯⋯⋯⋯．．III第一章绪论⋯．⋯⋯⋯⋯．．⋯⋯⋯⋯⋯⋯⋯．．⋯1第一节研究背景⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯11．1．1太阳电池的研究意义⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．11．1．2太阳电池工作原理⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．21．1．3硅基薄膜太阳电池的开发研究⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．2第二节硅基薄膜材料的研究现状及特点⋯⋯⋯⋯⋯⋯⋯⋯⋯．21．2．1非晶硅、微晶硅薄膜材料⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯21．2．2P型微晶硅窗口材料⋯⋯⋯⋯⋯⋯⋯⋯